Nanowire array fabricated by Al-Ge phase separation

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4629-4635

  Fukutani, Kazuhiko ^a   Ishida, Youhei ^a   Tanji, Koichi ^a   Den, Tohru ^a  

^a CANON INC   (Japan)

Author keywords

Al Ge; Al Si; Aluminum; Germanium; Nanostructures; Nanowires; Phase transitions; Silicon; Sputtering; Template assisted growth

Indexed keywords

ALUMINUM; FABRICATION; GERMANIUM; PHASE SEPARATION; PHASE TRANSITIONS; SILICON; SPUTTERING;

AL-GE FILMS; NANOPOROUS FILMS; NANOWIRE ARRAY; TEMPLATE ASSISTED GROWTH;

NANOSTRUCTURED MATERIALS;

EID: 33847140658     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.192     Document Type: Article

References (28)

1. Yasui N., Imada A., and Den T. Appl. Phys. Lett. 83 (2003) 3347
2. Thurn-Albrecht T., Schotter J., Kästle G.A., Emley N., Shibauchi T., Krusin-Elbaum L., Guarine K., Black C.T., Tuominen M.T., and Russell T.P. Science 290 (2000) 2126
3. Cui Y., Wei Q., Park H., and Lieber C.M. Science 293 (2001) 1289
4. Law M., Greene L., Johnson J., Saykally R., and Yang P. Nat. Matters 4 (2005) 455
5. Hicks L.D., and Dresselhaus M.S. Phys. Rev., B 47 (1993) 16631
6. Lin Y.M., Sun X., and Dresselhaus M.S. Phys. Rev., B 62 (2000) 4610
7. Martin C.R. Science 266 (1994) 1961
8. Masuda H., and Fukuda K. Science 268 (1995) 1466
9. Wu Y., Fan R., and Yang P. Nano Lett. 2 (2002) 83
10. Hu J., Ouyang M., Yang P., and Lieber C.M. Nature 399 (1999) 48
11. Moreles A.M., and Lieber C.M. Science 279 (1998) 208
12. Mohaddes-Ardacili L., Zheng H., Ogale S.B., Hannoyer B., Tian W., Wang J., Lofland S.E., Shinde S.R., Zhao T., Jia Y., Salamanca-Riba L., Schlom D.G., Wuttig M., and Ramesh R. Nat. Matters 3 (2004) 533
13. Zheng H., Wang J., Lofland S.E., Ma Z., Mohadded-Ardabili L., Zhao T., Salamanca-Riba L., Shinde S.R., Ogale S.B., Bai F., Viehland D., Jia Y., Schlom D.G., Wuttig M., Roytburd A., and Ramesh R. Science 303 (2004) 661
14. Fukutani K., Tanji K., Motoi T., and Den T. Adv. Mater. 16 (2004) 1456
15. Fukutani K., Tanji K., Saito T., and Den T. J. Appl. Phys. 98 (2005) 033507
16. Yasui N., Nakamura T., Fukutani K., Saito T., Aiba T., Ohashi Y., and Den T. J. Appl. Phys. 97 (2005) 10N103
17. Fukutani K., Ishida Y., Aiba T., Miyata H., and Den T. Appl. Phys. Lett. 87 (2005) 253112
18. Massalski T., Okamoto H., Subramanian P., and Kacprazak L. Binary Alloy Phase Diagrams (1990), American Society for Metals, Ohio
19. Adams C.D., Atzmon M., Cheng Y.T., and Srolovitz D.J. Appl. Phys. Lett. 59 (1991) 2535
20. Adams C.D., Atzmon M., Cheng Y.-T., and Srolovitz D.J. J. Mater. Res. 7 (1992) 653
21. Adams C.D., Srolovitz D.J., and Atzmon M. J. Appl. Phys. 74 (1993) 1707
22. He Z., Xu J., Chen K., and Feng D. J. Non-Cryst. Solids 266-269 (2000) 1025
23. Boogaard A., and van den Broek J.J. Thin Solid Films 401 (2001) 1
24. Atzmon M., Kessler D.A., and Srolovitz D.J. J. Appl. Phys. 72 (1992) 442
25. Catalina F., Afonso C.N., and Ortiz C. Thin Solid Films 167 (1988) 57
26. Cahn J.W. Acta Mater. 9 (1961) 795
27. Cahn J.W., and Hilliard J.E. J. Chem. Phys. 28 (1958) 258
28. Porter D., and Easterling K. Phase Transformations in Metals and Alloys (1981), Van Nostrand Reinhold, UK