Fabrication and evaluation of an "electrodeless" solidly mounted thin film electroacoustic resonator

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2005, Pages 1837-1839

  Enlund, J ^a   Katardjiev, I ^a   Martin, D M ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Aluminum nitride; Elecro acoustics, dielectric losses; Resonator; SMR; Sputtering

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTOELECTRIC EFFECTS; ALUMINUM COMPOUNDS; COMPUTER SIMULATION; MATHEMATICAL MODELS; RESONANCE; SPUTTERING;

ELECRO ACOUSTICS; SOLIDLY MOUNTED RESONATOR (SMR);

THIN FILMS;

EID: 33847130948     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603227     Document Type: Conference Paper

References (6)

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3. J.D. Larson III, et. al., "Modified Butterworth-Van Dyke Curicuit for FBAR Resonators and Automated Measurement System", IEEE UFFC Symp., pp 863-868, 2000
4. S.Kume, et. al. "Effects of Annealing on Dielectric Loss and Mictrostructure of Aluminum Nitride Ceramics", J. Am. Ceram. Soc., 2005
5. K. Nakamura, et. al. "Analysis of Thickness-Extensional Waves Propagating in the Lateral Direction of Solidly Mounted Piezoelectric Thin Film Resonators", IEEE Trans. UFFC, vol. 52, no. 4, pp. 604-609, 2005
6. H. Nowotny, E. Benes, "General One-dimensional Treatment of the Layered Piezoelectric Resonator With Two Electrodes", J, of Acoust. Soc. Am., 82(2), August 1987