Characterization of cross-coupling in capacitive micromachined ultrasonic transducers

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 601-604

  Bayram, Baris ^a   Kupnik, Mario ^a   Yaralioglu, Goksen G ^a   Oralkan, Ömer ^a   Dersong, Lin ^a   Xuefeng, Zhuang ^a   Ergun, Arif Sanli ^a   Sarioglu, Ali Fatih ^a   Wong, Serena H ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS; CROSS COUPLING; MEMBRANE DISPLACEMENTS; OPTICAL MEASUREMENTS;

CAPACITANCE; ELECTRIC VARIABLES MEASUREMENT; INTERFEROMETERS; MICROMACHINING; NATURAL FREQUENCIES; VELOCITY MEASUREMENT;

ULTRASONIC TRANSDUCERS;

EID: 33847126997     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602924     Document Type: Conference Paper

References (9)

1. D. Certon, N. Felix, E. Lacaze, F. Teston and F. Patat, "Investigation of cross-coupling in 1-3 piezocomposite arrays", IEEE Trans. on UFFC, Vol. 48, pp. 85-93, Jan. 2001.
2. D. Certon, N. Felix, L.P.T.H. Hue, F. Patat and M. Lethiecq, "Evaluation of laser probe performances for measuring cross-coupling in 1-3 piezocomposite arrays", in Proceedings of Ultrasonics Symposium, pp. 1091-1094, 1999.
3. X. Jin, Ö. Oralkan, F.L. Degertekin, B.T. Khuri-Yakub, "Characterization of One-Dimensional Capacitive Micromachined Ultrasonic Transducer Arrays", IEEE Trans, on UFFC, Vol. 48, pp. 750-760, May 2001.
4. D. Certon, G. Ferin, O.B. Matar, J. Guyonvarch, J.P. Remenieras, and F. Patat, "Influence of acousto-optic interactions on the diffracted field by an array obtained from displacement measurements", Ultrasonics, Vol. 42, pp. 465-471, 2004.
5. D. Alleyne, P. Cawley, "A two-dimenional fourier transformation method for the measurement of propagating multimode signals", J. Acoust. Soc. Am., Vol. 89 (3), 1991.
6. F. L. Degertekin, B.T. Khuri-Yakub, "Lamb wave excitation by hertzian contacts with applications in NDE", IEEE Trans. on UFFC, Vol. 44, pp. 769-779, Jul. 1997.
7. B. Bayram, G.G. Yaralioglu, A.S. Ergun, O. Oralkan, and B.T. Khuri-Yakub, "Dynamic fem analysis of multiple cmut cells in immersion", in Proceedings of Ultrasonics Symposium, pp. 252-255, 2004.
8. M. Wilm, A. Reinhardt, V. Laude, and S. Ballandras, "Three- dimensional modelling of micromachined-ultrasonic-transducer arrays operating in water," Ultrasonics 43 (6), 457-555 (2005).
9. S. Ballandras, M. Wilm, W. Daniau, A. Reinhardt, V. Laude, , and R. Armani, "Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers," J. Appl. Phys. 97 (3), 034901 (2005).