Sputter deposition of silicon-oxide coatings

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 43-46

  Jankowski, A F ^a   Hayes, J P ^a   Felter, T E ^a   Evans, C ^a   Nelson, A J ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Fused quartz; Silicon oxide coatings; X ray photoelectron spectroscopy

Indexed keywords

BACKSCATTERING; COMPRESSIVE STRESS; FUSED SILICA; RESIDUAL STRESSES; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON OXIDE COATINGS;

OPTICAL COATINGS;

EID: 0037011087     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00741-1     Document Type: Conference Paper

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