Analysis and design of dual-electrode CMUTs

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 581-584

  Guldiken, Rasim O ^a   Balantekin, Mujdat ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMUT; DUAL ELECTRODE CMUT; FREQUENCY SPECTRUM; IMAGING APPLICATIONS;

CAPACITANCE; ELECTRODES; FINITE ELEMENT METHOD; MICROMACHINING; SIGNAL RECEIVERS;

ULTRASONIC TRANSDUCERS;

EID: 33847120338     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602919     Document Type: Conference Paper

References (5)

1. D. M. Mills and L. S. Smith, "Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (cMUT) linear arrays," Proc. IEEE Ultrasonics Symposium, pp. 568-571, 2003.
2. J. McLean, R.O. Guldiken, and F. L. Degertekin, "CMUTs with Dual Electrodes for Improved Transmit and Receive Operation," Proc. IEEE Ultrasonics Symposium, pp. 501-4, 2004.
3. R.O. Guldiken, J. Mclean and F. L. Degertekin," CMUTs with Dual-electrode Structure for Improved Transmit and Receive Performance," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., accepted June 2005
4. E. S. Hung and S. D. Senturia, "Extending the Travel Range of Analog-Tuned Electrostatic Actuators," IEEE Journal of Microelectromechanical Systems, vol. 8, pp. 497-505, 1999.
5. N. A. Hall, R.O. Guldiken, J. McLean, and F. L. Degertekin, "Modeling and Design of CMUTs using Higher Order Vibration Modes for Harmonic Imaging," Proc. IEEE Ultrasonics Symposium, pp. 260-3, 2004.