Thermal decomposition of sputtered thin PtOx layers used in super-resolution optical disks

Applied Physics Letters

Volumn 86, Issue 12, 2005, Pages 1-3

  Kolobov, A V ^a,c   Wilhelm, F ^b   Rogalev, A ^b   Shima, T ^a   Tominaga, J ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTROMAGNETIC WAVE ABSORPTION; FLUORESCENCE; OPTICAL DEVICES; OPTICAL DISK STORAGE; PYROLYSIS; SANDWICH STRUCTURES; THERMOSTATS;

FLUORESCENCE MODES; MAGNETRON REACTIVE SPUTTERING; OPTICAL DISK STRUCTURES; REAL-DEVICE STRUCTURES;

PLATINUM COMPOUNDS;

EID: 17944375686     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1886255     Document Type: Article

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