Microfabrication and characterization of evolutionary MEMS resonators

Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr

Volumn 2005, Issue , 2005, Pages 101-106

  Kamalian, Raffi ^a   Ying, Zhang ^b   Agogino, Alice M ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; EVOLUTIONARY ALGORITHMS; FEEDBACK CONTROL; GENETIC ALGORITHMS; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION;

CONSTRAINT SETTINGS; DESIGN CHARACTERISTICS; PERFORMANCE GOALS;

RESONATORS;

EID: 33847076832     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2005.1589972     Document Type: Conference Paper

References (12)

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9. MEMSCAP, PolyMUMPS Run Data, Run #60, http://memscap.com/memsrus/ svcsdata.php?RunID=60
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12. R. Kamalian, A.M. Agogino, "Improving Evolutionary Synthesis of MEMS through Fabrication and Testing Feedback", IEEE Systems, Man and Cybernetics (SMC) 2005, Waikoloa, HI, USA October 2005.