Improving evolutionary synthesis of MEMS through fabrication and testing feedback

Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics

Volumn 2, Issue , 2005, Pages 1908-1913

  Kamalian, Raffi ^a   Agogino, Alice M ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Evolutionary computer aided design; Genetic algorithms; MEMS; Resonator design; Validation

Indexed keywords

COMPUTER AIDED DESIGN; GENETIC ALGORITHMS; MACHINE DESIGN; RESONATORS; SIMULATORS; STATISTICAL METHODS;

EVOLUTIONARY COMPUTER-AIDED DESIGN; RESONATOR DESIGN; SYNTHESIS PROGRAM; VALIDATION;

MICROELECTROMECHANICAL DEVICES;

EID: 27944504679     PISSN: 1062922X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. N. Zhou., A.M. Agogino, "Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)," Proceedings of the ASME Design Automation Conference, Montreal, Canada, Sept. 29-Oct. 2, 2002.
2. R. Kamalian, A.M. Agogino, and H. Takagi, "The Role Of Constraints and Human Interaction in Evolving MEMS Designs: Microresonator Case Study, " Proceedings of DETC'04, ASME 2004 Design Engineering Technical Conference, Salt Lake City, UT, October 2004.
3. D.E. Goldberg, Genetic Algorithms in Search, Optimization and Machine Learning, Addison-Wesley Longman Publishing Co., Inc., Boston, MA, 1989
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5. PolyMUMPS, http://memsrus.com/svcssurf.html
6. R. Kamalian, "Evolutionary Synthesis of MEMS Devices," Ph.D. Thesis, Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 2004.
7. MEMSCAP, PolyMUMPS Run Data, Run #60, http://www.memscap.com/memsrus/svcsdata.php?RunID= 60&CurrentPage=6.
8. A. E. Galef, Bending Frequencies of Compressed Beams, J. Acoust. Soc. Am, 44, 1968.
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