Validation and evaluation for defect-kill-rate and yield estimation models in semiconductor manufacturing

International Journal of Production Research

Volumn 45, Issue 4, 2007, Pages 829-844

  Yeh, C H ^a   Chen, C H ^b   Wu, F C ^b   Chen, K Y ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b VAN NUNG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Kill rate of visual defect; Semiconductor manufacturing; Taguchi's SN ratio; Yield estimation

Indexed keywords

MATHEMATICAL MODELS; RANDOM PROCESSES; SIGNAL FILTERING AND PREDICTION; SIGNAL TO NOISE RATIO;

KILL RATE OF VISUAL DEFECTS; SEMICONDUCTOR MANUFACTURING; TAGUCHI'S SN RATIO; YIELD ESTIMATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33847017804     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540600677732     Document Type: Article

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