Heteroepitaxial growth of Nb-doped SrTiO3 films on Si substrates by pulsed laser deposition for resistance memory applications

Applied Physics Letters

Volumn 90, Issue 5, 2007, Pages

  Xiang, Wenfeng ^a   Dong, Rui ^a   Lee, Dongsoo ^a   Oh, Seokjoon ^a   Seong, Dongjun ^a   Hwang, Hyunsang ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; NIOBIUM; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; STRONTIUM COMPOUNDS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

BUFFER LAYERS; HETEROEPITAXIAL GROWTH; PROCESS COMPATIBILITY; RESISTANCE MEMORY APPLICATIONS;

SEMICONDUCTING FILMS;

EID: 33846985585     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2435330     Document Type: Article

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