메뉴 건너뛰기




Volumn 515, Issue 7-8, 2007, Pages 3760-3765

Transparent conducting indium bismuth oxide

Author keywords

Indium bismuth oxide; Laser annealing; Sputter deposition; Transparent conducting oxide

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRON DIFFRACTION; INDIUM COMPOUNDS; SPUTTER DEPOSITION; X RAY DIFFRACTION;

EID: 33846933092     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.040     Document Type: Article
Times cited : (5)

References (14)
  • 7
    • 3843077407 scopus 로고    scopus 로고
    • Sturtevant J.L. (Ed)
    • Tu Y., Chapman G.H., and Peng J. In: Sturtevant J.L. (Ed). Advances in Resist Technology and Processing XXI, Bellington, WA. Proc. SPIE vol. 5376 (2004) 867
    • (2004) Proc. SPIE , vol.5376 , pp. 867
    • Tu, Y.1    Chapman, G.H.2    Peng, J.3
  • 8
    • 0344982225 scopus 로고    scopus 로고
    • Piqué A., Suguika K., Herman P.R., Fieret J., Bachmann F.G., Dubowski J.J., Hoving W., Washio K., Geohegan D.B., Träger F., and Murakami K. (Eds)
    • Chapman G.H., and Tu Y. In: Piqué A., Suguika K., Herman P.R., Fieret J., Bachmann F.G., Dubowski J.J., Hoving W., Washio K., Geohegan D.B., Träger F., and Murakami K. (Eds). Photon Processing in Microelectronics and Photonics II. Proc. SPIE vol. 4977 (2003) 257
    • (2003) Proc. SPIE , vol.4977 , pp. 257
    • Chapman, G.H.1    Tu, Y.2
  • 9
    • 0001168551 scopus 로고    scopus 로고
    • Gower M.C., Helvajian H., Sugioka K., and Dubowski J.J. (Eds)
    • Chapman G.H., Tu Y., and Sarunic M.V. In: Gower M.C., Helvajian H., Sugioka K., and Dubowski J.J. (Eds). Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, San Jose, CA. Proc. SPIE vol. 4274 (2001) 183
    • (2001) Proc. SPIE , vol.4274 , pp. 183
    • Chapman, G.H.1    Tu, Y.2    Sarunic, M.V.3
  • 10
    • 33846915486 scopus 로고    scopus 로고
    • Sarunic M.V., Chapman G.H., and Tu Y. Advances in Resist Technology and Processing XVIII, Santa Clara, CA, Mar 2001. Proc. SPIE vol. 4345 (2001) 557
    • (2001) Proc. SPIE , vol.4345 , pp. 557
    • Sarunic, M.V.1    Chapman, G.H.2    Tu, Y.3
  • 14
    • 33846904905 scopus 로고    scopus 로고
    • 2.33 (27-51).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.