Moisture sensor using reactive sputtered TiO2 thin film with negative substrate bias

International Symposium on Electronic Materials and Packaging, EMAP 2000

Volumn , Issue , 2000, Pages 449-456

  Chow, L L W ^a   Yuen, M M F ^a   Chan, P C H ^a   Teng, A ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHIP SCALE PACKAGES; MODIFIED ATMOSPHERE PACKAGING; MOISTURE; MOISTURE CONTROL; MOISTURE METERS; POROUS SILICON; REACTIVE SPUTTERING; SINTERING; SOL-GEL PROCESS; SOL-GELS; SPUTTERING; TEMPERATURE; THIN FILMS;

ENVIRONMENTAL CONDITIONS; FABRICATION TECHNIQUE; HYSTERESIS PERFORMANCE; NEGATIVE SUBSTRATES; POWDER SINTERING METHODS; REACTIVE SPUTTERING PROCESS; REAL TIME MONITORING; THIN-FILM TECHNOLOGY;

PROCESS CONTROL;

EID: 33846927036     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMAP.2000.904198     Document Type: Conference Paper

References (27)

1. M. K. Jain, M. C. Bhatnagar, G. L. Sharma, Effect of Li+ Doping on ZrO2-TiO2 Humidity Sensor, Sensors and Actuators B 55 (1999) 180-185.
2. K. Katayama, H. Hasegawa, T.Noda, and T. Akiba, Effect of Alkaline Oxide Addition on the Humidity Sensitivity of Nb2O-doped TiO2, Sensors and Actuators B 2 (1990) 143-149.
3. J. Slunecko, J. Hole, M. Hrovat, and M. Ceh, Thick-film Humidity Sensors based on (Ba, Sr)TiO3 Porous Ceramic Doped with MgO and CaO, Sensors and Actuators B 7 (1992) 439-442.
4. G. Montesperelli, A. Pumo, E. Traversa, G. Gusmano, A. Bearzotti, A. Montenero, G. Gnappi, Sol-gel Processed TiO2-based Thin Films as Innovative Humidity Sensors, Sensors and Actuators B 24-25 (1995)705-709.
5. R.F. Macko, Proc. Of the NBS/RADC Workshop on Moisture Measurement Technology or Hermatic Semiconductor Devices, II, E. C. Cohen and S. Ruthberg, Eds, NBS special Publication 400-72, pp.110-112, 1982.
6. C. P. Wong, ed, Polymers for Electronic and Photonic Applications, Academic Press, 1993
7. N. Tanaka, M. Kitano, T. Kumazawa, A. Nishimura, Evaluating IC-package interface Delamination by Considering Moisture-induced Molding-compound Swelling, IEEE Transactions on Components & Packaging Technologies, vol.22, no.3, (1999) 426-432.
8. M. Pecht, A Model for Moisture Induced Corrosion Failures in Microelectronic Packages, IEEE Transactions on Components Hybrids & Manufacturing Technology, vol.13, no.2, (1990) 383-389.
9. T.R. Conrad and R. L. Shook, Impact of Moisture/ Reflow Induced Delaminations on Integrated Circuit Thermal Performance, Proceedings-IEEE Electronic Components and Technology Conference, New York, NY, USA, 1994, p.527-531.
10. M. Pecht, L. Nguyen and E. Hakim, in: M. Pecht (Ed.) Plastic Encapsulated Microelectronics, Wiley, New York, 1995, pp. 175-194 (Chapter 4).
11. M. Pecht, L. Nguyen and E. Hakim, in: M. Pecht (Ed.) Plastic Encapsulated Microelectronics, Wiley, New York, 1995, pp.421-430.
12. F.R. Bryant, A.R. Singh, J.A. Cunningham, Double Mask Hermetic Passivation Method Providing Enhanced Resistance to Moisture, EP 0851476 A2, 1998
13. Nguyen LT, Chen AS, Peterson DW, Quearry D, Reilly JF. Moisture sensing and stress test chips for plastic packaging qualification SMI. Surface Mount International. Advanced Electronics, Manufacturing Technologies. Proceedings of The Technical Program. Surface Mount Technol. Ass, vol.2, 1996, pp.593-606
14. T. Kuroiwa, T. Hayashi, and A. Ito, A thin film polyimide based capacitive type relative humidity sensor, Sensors and Actuators B, 13-14 (1993) 89-91
15. L. Meites et al, CRC Handbook Series in Inorganic Electrochemistry, CRC Press, 1988.
16. T. Y. Kim, D. H. Lee, Y.C. Shim, J. U. Bu and S. T. Kim, Effects of Alkaline Oxide Additives on the Microstructure and Humidity Sensitivity of MgCr2O4-TiO2, Sensors and Actuators B 9 (1992) 221-225.
17. B. Fubini, and V. Bolis, The Reactivity of Oxides with Water Vapor, Solid State Ionics 32-33 (1989) 258-272.
18. Z. Ding, G. Q. Lu, and P. F. Greenfield, Role of the Crystalline Phase of TiO2 in Heterogeneous Photocatalysis for Phenol Oxidation in Water, J. Phys. Chem. B 104 (2000) 4815-4820.
19. M. Egashira, S. Kawasumi, S. Kagawa, and T. Seiyama, Temperature Programmed Desorption Study of Water Adsorbed on Metal Oxides. 1. Anatase and Rutile, Bulletin of the Chemical Society of Japan, Vol 51,11 (1978) 3144-3149.
20. A. Bearzotti, A. Bianco, G. Montesperelli and E. Traversa, Humidity Sensitivity of Sputtered TiO2 Thin Film, Sensors and Actuators B 18-19 (1994) 525-528.
21. D. Wicaksana, T. Tsujikawa, A. Kobayashi, K. Ono and A. Kinbara, Ion Bombardment Effects of the Growth of Rutile Phase of Reactively Sputtered TiO2 Thin Films, Mat. Res. Soc. Symp. Proc, Vol. 311 (1993) 233-238.
22. D. Wicaksana, A. Kobayashi, and A. Kinbara, Process Effects on Structural Properties of TiO2 Thin Films by Reactive Sputtering, J. Vac. Sci. Technol. A 10(1992) 1479-1487.
23. R. K. Sharma, Z. Tang, P. C. H. Chan, J. K. O. Sin and I. M. Hsing, Compatibility of CO Gas Sensitive SnO2 /Pt Thin Film with Silicon Integrated Circuit Processing, Sensors and Actuators B 64 (2000) 49-53.
24. R. A. Spurr, and H. Myers, Quantitative Analysis of Anatase-Rutile Mixtures with an X-ray Diffractiometer, Anal. Chem. 29 (1957) 760.
25. Y. H. Zhang, C. K. Chan, J. F. Porter and W. Guo, Micro-Raman Spectroscopic Characterization of Nanosized TiO2 Powders prepared by Vapour Hydrolysis, J. Mater. Res., Vol. 13, No. 9 (1998) 2602-2609.
26. S. J. Gregg, K. S. Sing, " Adsorption, Surface Area an Porosity", Academic Press, 1982
27. W.J. Flemming, A physical understanding of solid state humidity sensors, Society of Automotive Engineers Papers 810432 (1982) 1656