New method for the Langmuir probe diagnostics of polymerizing plasmas

Russian Microelectronics

Volumn 36, Issue 1, 2007, Pages 14-26

  Rudenko, K V ^a   Myakon'kikh, A V ^a   Orlikovsky, A A ^a   Pustovit, A N ^b  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC SPACE CHARGE; ION BOMBARDMENT; POLYMERIZATION;

LANGMUIR PROBE DIAGNOSTICS; NONCONDUCTING FILM; POLYMERIZING PLASMAS;

PLASMA DIAGNOSTICS;

EID: 33846805367     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063739707010027     Document Type: Article

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