A novel and convenient method for monitoring processing plasma: The insulated pulse probe method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 3 A, 1998, Pages 970-980

  Deguchi, Mikio ^a   Itatani, Ryohei ^a  

^a NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Langmuir probe; Plasma diagnostics; Plasma processing; Pulsed probe; Reactive plasma

Indexed keywords

PLASMA PROBES; TEMPERATURE MEASUREMENT;

INSULATED PULSE PROBE PLASMA; LANGMUIR PROBE METHOD;

PLASMA DIAGNOSTICS;

EID: 0032022260     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.970     Document Type: Article

References (11)

1. see, for example, J. F. Waymouth: J. Appl. Phys. 30 (1959) 1404.
2. T. Sakaguchi and R. Itatani: Kakuyugo Kenkyu 1 (1958) 432 [in Japanese].
3. M. Deguchi and R. Itatani: Proc. 13th Symp. Plasma Processing, Tokyo, Jan. 1996, p. 447.
4. M. Deguchi and R. Itatani: Ext. Abstr.(56th Autumn Meet., 1995) Japan Society of Applied Physics, 26p-M8 [in Japanese].
5. T. Okuda: J. IEE Jpn. 83-11 (1958) No. 902, 1922 [in Japanese].
6. R. W. Carlson, T. Okuda and H. J. Oskam: Physica 30 (1964) 182.
7. T. Okuda, R. W. Carlson and H. J. Oskam: Physica 30 (1964) 193.
8. H. J. Oskam, R. W. Carlson and T. Okuda: Physica 30 (1964) 375.
9. M. Deguchi and R. Itatani: Ext. Abstr. (43rd Spring Meet., 1996) Japan Society of Applied Physics and Related Societies, 29a-Cl [in Japanese].
10. F. W Crawford and R. Grard: J. Appl. Phys. 37 (1966) 180.
11. M. Deguchi and R. Itatani: Ext. Abstr. (57th Autumn Meet., 1996) Japan Society of Applied Physics, 9a-Q1 [in Japanese].