Molecular brushes as templating agents for nanoporous SiLK* dielectric films

ACS Symposium Series

Volumn 874, Issue , 2004, Pages 199-208

  Niu, Q Jason ^a   Martin, Steven J ^a   Godschalx, James P ^a   Townsend, Paul H ^a  

^a DOW CHEMICAL COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33846797740     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: 10.1021/bk-2004-0874.ch015     Document Type: Conference Paper

References (7)

1. Godschalx, J. P. et al. US Patent 5965679.
2. Chujo, Y.; Ihara, E. Macromolecules, 1993, 26, 5681.
3. Hedrick, J. L.; Hawker, C. J.; Miller, R. D.; Tweig, R.; Srinivasam, S. A.; Trollsas, M. Macromolecules, 1997, 30, 7607.
4. Remenar, J. F.; Hawker, C. J.; Hedrick, J. L.; Miller, R. D.; Yoon, D. Y.; Kim, S. M.; Trollsas, M. Poly. Prep., 1998, 39 (1), 631.
5. Wintermantel, M., Fisher, K., Gerle, M., Ries, R., Schmidt, M., Kajiwara, K., Urakawa, H., Wataoka, I. Angew. Chem. Int. Ed. Engl., 1995, 34, 1472.
6. Yamada, K.; Miyazaki, M.; Ohno, K.; Fukuda, T.; Minoda, M. Macromolecules, 1999, 32, 290
7. Martin, S. J., Godschalx, J. P., Mills, M. E., Shaffer, E. O., Townsend, P. H. Adv. Mater, 2000, 12, 1769.