Dendri-glass-design of ultra-low dielectric constant materials using specialty highly branched polymers

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 39, Issue 1, 1998, Pages 631-632

  Remenar, Julius F ^a   Hawker, Craig J ^a   Hedrick, James L ^a   Miller, Roben D ^a   Yoon, Do Y ^a   Kim, Sung Mog ^a   Trollsås, Mikael ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES OF SOLIDS; INFRARED SPECTROSCOPY; MOLECULAR WEIGHT; MONOMERS; PERMITTIVITY; PLASTIC FILMS; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; THIN FILMS;

POLYCAPROLACTONES; SPIN ON GLASSES (SOG);

POLYMERIC GLASS;

EID: 0032026055     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)

1. For leading references on materials requirements for microchip processing, see Miller, R. D., Hedrick, J. L. Yoon, D. Y.; Cha, H.-J.; Flores, V.; Harbison, M.; Di Pietro, R.; Hinsberg, W.; Deline, V. Brown, M. R.; Srinivasan; Hummel, J.; Cook, R.; Liniger, E.; Simonyi, E.; Klaus, D. in Low-Dielectric Constant Materials II, Mat. Res. Soc. Symp. Proc.; Lagendijk, A., Treichel, H., Uram, K. J., Jones, A. C., Eds.; MRS : Pittsburgh, 1997; Vol 443, pp 47-58.
2. (a) Saegusa, T.; Chujo, Y. Makromol. Chem., Macromol. Symp. 1992, 64, 1.
3. (b) Chujo, Y.; Ihara, E.; et al. Macromolecules 1993, 26, 5681.
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8. (a) Hedrick, J. L.; Cha, H.-J., Miller, R. D.; Yoon, D. Y.; Brown, H. R.; Srinivasan, S.; Di Pietro, R.; Cook, R. F.; Hummel, J. P.; Klaus, D. P.; Liniger, E. G.; Simonyi, E. E. Macromolecules, in Press.
9. (b) Hedrick, J. L., Hawker, C. J. Miller, R. D., Twieg, R., Srinivasan, S. A.; Trollsås, M. Macromolecules, in press.
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11. Sanchez, M. I.; Hedrick, J. L.; Rüssel, T. P. J. Polym. Sci: Part B: Polym. Phys, 1995, 33, 253.