A full colour quarter-VGA poly-silicon AMLCD manufactured without ion doping technologies

SID Conference Record of the International Display Research Conference

Volumn 2005, Issue , 2005, Pages 496-499

  Baur, Holger ^a   Jelting, Sven ^a   Benson, Niels ^a   Feiler, Gernot ^a   Ferenci, Damir ^a   Fruehauf, Norbert ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COLOR; OPTICAL FILTERS; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SEMICONDUCTOR DOPING;

CHAIR OF DISPLAY TECHNOLOGY; FAN DOPING TECHNOLOGIES; ION DOPING; POLY-SILICON AMLCD;

LIQUID CRYSTAL DISPLAYS;

EID: 33846591378     PISSN: 10831312     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. H.Baur, S.Jelting, N.Benson, N.Fruehauf: An LTPS Active-Matrix Process without Ion Doping; SID 05 Digest, pp1266-1269, 2005.
2. K.Sera, F.Okumura, H.Uchida, S.Itoh, S.Kaneko, K.Hotta: High-Performance TFT's Fabricated by XeCl Eximer Laser Annealing of Hydrogenated Amorphous-Silicon Film, IEEE Transactions on Electron Devices, Vol.36, No. 12, 1989
3. Jae-Hong Jeon, Min-Cheol Lee, Kee-Chan Park, SangHoon Jung, Min-Koo Han: A New Poly-Si TFT with Selectively Doped Channel Fabricated by Novel Excimer Laser Annealing; IEDM 2000, pp213-216
4. E. Lueder: Liquid Crystal Displays: Addressing Schemes and Electro-Optical Effects, Wiley-SID Series in Display Technology, 2001