Crystalline orientation and surface structure anisotropy of annealed thin tungsten films

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5518-5521

  Wang, Yuan ^a   Song, Z X ^b   Ma, Dayan ^b   Wei, X Y ^a   Xu, Kewei ^b  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Crystal; Surface morphology; Thin film; Tungsten

Indexed keywords

ANISOTROPY; ANNEALING; COMPUTATIONAL GEOMETRY; CRYSTAL ORIENTATION; FRACTALS; INTERFACIAL ENERGY; MAGNETRON SPUTTERING; SURFACE STRUCTURE; TEXTURES; WAVELET TRANSFORMS;

STRAIN ENERGY; TEXTURE COEFFICIENT;

TUNGSTEN;

ANISOTROPY; ANNEALING; COMPUTATIONAL GEOMETRY; CRYSTAL ORIENTATION; FRACTALS; INTERFACIAL ENERGY; MAGNETRON SPUTTERING; SURFACE STRUCTURE; TEXTURES; TUNGSTEN; WAVELET TRANSFORMS;

EID: 33846509723     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.090     Document Type: Article

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