Two-dimensionally self-holding deflection mirror using surface acoustic wave motor

Optical Review

Volumn 13, Issue 4, 2006, Pages 195-200

  Iseki, Takayuki ^a   Shigematsu, Takashi ^b   Okumura, Mikio ^a   Sugawara, Takashi ^a   Kurosawa, Minoru K ^b  

^a Victor Company of Japan Limited   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Magnetic attraction force; MEMS; Mirror; Self holding; Surface acoustic wave; Two dimensional

Indexed keywords

EID: 33846493066     PISSN: 13406000     EISSN: 13499432     Source Type: Journal    
DOI: 10.1007/s10043-006-0195-2     Document Type: Article

References (18)

1. D. W. Wine, M. P. Helsel, L. Jenkins, H. Urey and T. D. Osborn: Proc. SPIE 4178 (2000) 186.
2. V. A. Aksyuk, F. Pardo, C. A. Bole, S. Arney, C. R. Giles and D. J. Bishop: Proc. SPIE 4178 (2000) 320.
3. N. Asada, H. Matsuki, K. Minami and M. Esashi: IEEE Trans. Magn. 30 (1994) 4647.
4. R. Sawada, E. Hashiguchi, A. Shimizu and T. Maruno: Proc. Int. Conf. Optical MEMS 2001, 2001, p. 23.
5. O. Tsuboi, Y. Mizuno, N. Koma, H. Soneda, H. Okuda, S. Ueda, I. Sawaki and Y. Yamagishi: Proc. MEMS 2002, 2002, p. 532.
6. H. Goto: Proc. SPIE 3419 (1998) 227.
7. D. Barbier: Proc. Eurosensors 2003, 2003, p. 474.
8. K. Yamada and T. Kuriyama: Proc. Eurosensors 2003, 2003, p. 474.
9. H. Miyajima, N. Asaoka, M. Arima, Y. Miyamoto, K. Murakami, K. Tokuda and K. Matsumoto: IEEE J. Microelectromech. Syst. 10 (2001) 418.
10. Y. Takahashi, T. Takeuchi, G. Reyne and H. Fujita: Int. Conf. Optical MEMS 2001, 2001, p. 9.
11. T. Iseki, M. Okumura and T. Sugawara: Opt. Rev. 13 (2006) 189.
12. A. Baba, H. Okano, H. Uetsuka and M. Esashi: Proc. MEMS 2003, 2003, p. 251.
13. M. Kurosawa, M. Takahashi and T. Higuchi: IEEE Trans. Ultrason., Ferroelectr., Freq. Contr. 43 (1996) 901.
14. M. Kurosawa, M. Takahashi and T. Higuchi: Ultrasonics 34 (1996) 243.
15. M. Chiba, M. Takahashi, M. Kurosawa and T. Higuchi: Proc. MEMS 1997, 1997, p. 94.
16. M. Kurosawa, M. Takahashi and T. Higuchi: Proc. IEEE Ultrason. Symp., 1994, p. 535.
17. K. Asai, M. K. Kurosawa and T. Higuchi: Proc. IEEE Ultrason. Symp., 2000, p. 675.
18. M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki and T. Higuchi: Proc. IEEE Conf. MEMS 2001, 2001, p. 252.