Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions

Applied Physics Letters

Volumn 90, Issue 3, 2007, Pages

  Opsomer, K ^a,d   Deduytsche, D ^b   Detavernier, C ^b   Van Meirhaeghe, R L ^b   Lauwers, A ^a   Maex, K ^a,d   Lavoie, C ^c  

^a IMEC   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FORMATION TEMPERATURES; GERMANIDE FORMATION; SOLID STATE REACTIONS;

COBALT; CRYSTALLIZATION; GERMANIUM; SINGLE CRYSTALS; SOLID STATE PHYSICS; SUBSTRATES;

THIN FILMS;

EID: 33846464162     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2431781     Document Type: Article

References (13)

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13. For silicides, the uncertainties for these values are typically between 1 and 6 kJmol of product phase. This may become significant when taking the weighed differences for the respective reactions. See also C. Detavernier, X. P. Qu, R. L. Van Meirhaeghe, B. Z. Li, and K. Maex, J. Mater. Res. 18, 1668 (2003).