Design and fabrication of microchannels for magnetohydrodynamic flow

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 396-399

  Bao, Jian Bin ^a   Harrison, D J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Current density; Electrodes; Electromagnetic compatibility; Fabrication; Insulation; Magnetohydrodynamic power generation; Microchannel; Rough surfaces; Surface roughness; Wafer bonding

Indexed keywords

CURRENT DENSITY; ELECTRODES; ELECTROMAGNETIC COMPATIBILITY; ELECTRONIC EQUIPMENT TESTING; ELECTROPLATING; FABRICATION; GLASS BONDING; INSULATION; LIQUID CHROMATOGRAPHY; MAGNETOHYDRODYNAMIC POWER GENERATION; MAGNETOHYDRODYNAMICS; MICROCHANNELS; POLISHING; SILICON WAFERS; SURFACE ROUGHNESS;

ELECTROMAGNETIC CHANNELS; INSULATION LAYERS; MAGNETO-HYDRODYNAMIC FLOW; MAGNETOHYDRODYNAMIC FLOWS; POLISHING PROCESSS; RECTANGULAR CROSS-SECTIONS; RECTANGULAR GROOVE; ROUGH SURFACES;

WAFER BONDING;

EID: 33846449356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1222030     Document Type: Conference Paper

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