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Volumn 22, Issue 26, 2006, Pages 11400-11404

Improved silicon nitride surfaces for next-generation microarrays

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICAL VAPOR DEPOSITION; FLUORESCENCE; GENES; INTEGRATED CIRCUITS; SILICON NITRIDE;

EID: 33846382691     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la060489v     Document Type: Article
Times cited : (10)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.