Polymer coating behavior of rayleigh-SAW resonators with gold electrode structure for gas sensor applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 1, 2007, Pages 157-166

  Avramov, Ivan D ^a,b   Länge, Kerstin ^c   Rupp, Swen ^c   Rapp, Bastian ^c   Rapp, Michael ^c  

^a IEEE   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILM DEPOSITION; GOLD ELECTRODES; POLYMER COATINGS;

ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL SENSORS; COATINGS; ELECTRODES; RESONANCE;

RESONATORS;

POLYMER;

ACOUSTICS; ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; GAS; GENETIC PROCEDURES; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER; VIBRATION;

ACOUSTICS; BIOSENSING TECHNIQUES; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GASES; MICROELECTRODES; POLYMERS; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; VIBRATION;

EID: 33846331980     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.221     Document Type: Article

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