Deposition of high quality coatings on SAW sensors using electrospray

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 115-119

  Bender, Florian ^a   Wächter, Lars ^b   Voigt, Achim ^a   Rapp, Michael ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF BONN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL VAPOR DEPOSITION; COMPUTER SOFTWARE; OPTICAL SENSORS; PATTERN RECOGNITION; THICKNESS MEASUREMENT;

ELECTROSPRAY; POLYMER LAYERS;

PLASTIC COATINGS;

EID: 1542273587     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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