Investigations on plasma-polymer-coated SAW and STW resonators for chemical gas-sensing applications

IEEE Transactions on Microwave Theory and Techniques

Volumn 49, Issue 4 II, 2001, Pages 827-837

  Avramov, Ivan D ^a,b   Kurosawa, Shigeru ^c   Rapp, Michael ^d   Krawczak, Piotr ^d   Radeva, Ekaterina I ^b  

^a IEEE   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c NATL INST OF MAT AND CHEM RES   (Japan)

^d KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Films; Gas detectors; Plasma; Polymers; Surface acoustic wave resonators

Indexed keywords

SURFACE ACOUSTIC WAVE (SAW) RESONATORS; SURFACE TRANSVERSE WAVE (STW) RESONATORS;

CHEMICAL SENSORS; FILMS; GAS DETECTORS; MICROWAVE OSCILLATORS; PLASMA POLYMERIZATION; PLASMAS; RESONATORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035304168     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.915471     Document Type: Article

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