An integrated micro-fluxgate magnetic sensor with sputtered ferromagnetic core

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn , Issue , 2006, Pages 2045-2049

  Baschirotto, Andrea ^a   Dallago, Enrico ^b   Malcovati, Piero ^b   Marchesi, Marco ^b   Melissano, Enrico ^c   Siciliano, Pietro ^c   Venchi, Giuseppe ^b  

^a UNIVERSITY OF SALENTO   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

^c CNR   (Italy)

Author keywords

Amorphous core; DC magnetron sputtering; Magnetic sensors; Planar micro Fiuxgate

Indexed keywords

ALUMINUM; ELECTRODEPOSITION; FERROMAGNETIC MATERIALS; MAGNETIC CORES; MAGNETIC FIELD EFFECTS; MAGNETIC FLUX; MAGNETRON SPUTTERING;

AMORPHOUS CORES; FERROMAGNETIC CORES; FLUXGATE SENSORS; METAL LINES;

MAGNETIC SENSORS;

EID: 33846274911     PISSN: 10915281     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMTC.2006.328426     Document Type: Conference Paper

References (16)

1. Pavel Ripka, "Magnetic Sensors and magnetometers", Artech House Boston, London (2001).
2. M. Vopàlensky, P. Ripka, A. Platil, "Precise magnetic sensors" Sensors and Actuators A 106 (2003) pp. 38-42.
3. C.H. Smith, R.W. Schneider, "Magnetic field sensing utilizing GMR materials", Sensor Review 18 1998 230-236.
4. R. Popovic, W. Heidenreich, Magnetogalvanic sensors, In: R. Boll, K.J. Overshott, Eds., "Magnetic Sensors", vol. 5, Sensors, A Comprehensive Survey, VCH, 1989, pp. 43-95.
5. R. Gottfried-Gottfried, W. Budde, R. Jahne, H. Kuck, B. Sauer, S. Ulbricht, and U. Wende, "A miniaturized magnetic-field sensor system consisting of a planar fiuxgate sensor and a CMOS readout circuitry", Sens. Actuators A, vol. 54, pp. 443-447, 1996.
6. S. O. Choi, S. Kawahito, Y. Matsumoto, M. Ishida, and Y. Tadokoro, "An integrated micro fluxgate magnetic sensor," Sens. Actuators A, vol.55, pp. 121-126, 1996.
7. S. Kawahito, C. Maier, M. Schneider, M. Zimmermann, and H. Baltes, "A 2-D CMOS microfluxgate sensor system for digital detection of weak magnetic field," IEEE J. Solid-State Circuits, vol. 34, no. 12, pp. 1843-1851, Dec. 1999.
8. P. Ripka, S. Kawahito, S. O. Choi, A. Tipek, and M. Ishida, "Microfluxgate sensor with closed core," Sens. Actuators A, vol. 91, pp. 65-69, 2001.
9. S. Kawahito, A. Cerman, K. Aramaki, and Y. Tadokoro, "A weak magnetic field measurement system using micro-fluxgate sensors and delta-sigma interface," IEEE Trans. Instrum. Meas., vol. 52, no. 1, pp. 103-110, Feb. 2003.
10. L. Chiesi, P. Kejik, B. Jannosy, and R. S. Popovic, "CMOS planar 2D micro-fluxgate sensor," Sens. Actuators A, vol. 82, pp. 174-180, 2000.
11. Predrag M. Drljaca, Pavel Kejik, Franck Vincent, Dominique Piguet, and Radivoje S. Popovic, "Low-Power 2D Fully Integrated CMOS Fiuxgate Magnetometer", IEEE Sensors Journal (2005).
12. A. Baschirotto, E. Dallago, P. Malcovati, M. Marchesi, G. Venchi, "From a PCB Fiuxgate to an integrated micro Fiuxgate magnetic sensor", Proceeding of Instrumentation and Measurement Technology Conference (IMTC-2005), Ottawa (Canada) 17-19 May 2005, pp. 1756-1760;
13. A. Baschirotto, F. Borghetti, E. Dallago, P. Malcovati, M. Marchesi, E. Melissano, G. Venchi and P.Siciliano, "Fiuxgate magnetic sensor and front-end circuitry in a micro-integrated system", EUROSENSORS XIX, Barcelona (Spain) 11-14 September 2005;
14. Vacuumschmelze Hanau Germany, Amorphous metals VITROVAC www.vacuumschmelze.de
15. P.T. Squire, S.M. Sheard, C.H. Carter and M.R.J. Gibbs, "Digital M-H plotter for low-coercivity metallic glasses", J.Phys. E: Sci Instrum. 21 (1988), pp. 1167-1172.
16. M. Ali "Growth and Study of Magnetostrictive FeSiBC Thin Films for Device Applications", University of Sheffield (1999) Ph.D thesis.