CMOS planar 2D micro-fluxgate sensor

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 174-180

  Chiesi, L ^a   Kejik, P ^a   Janossy, B ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CMOS INTEGRATED CIRCUITS; COMPASSES (MAGNETIC); ELECTRIC COILS; ERROR ANALYSIS; FERROMAGNETIC MATERIALS; MAGNETIC CORES; MAGNETIC DEVICES; MAGNETIC FIELD EFFECTS; MAGNETIC FLUX; MAGNETOMETERS; SEMICONDUCTING SILICON;

MICROFLUXGATE SENSORS;

MICROSENSORS;

EID: 0033733838     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00360-X     Document Type: Article

References (8)

1. Smith C.H., Schneider R.W. Magnetic field sensing utilizing GMR materials. Sensor Review. 18:1998;230-236.
2. R. Popovic, W. Heidenreich, Magnetogalvanic sensors, In: Magnetic Sensors, vol. 5, Sensors, A Comprehensive Survey, R. Boll, K.J. Overshott, (Eds.), VCH, 1989, pp. 43-95.
3. Mohri K., Uchiyama T., Panina L. Recent advances of micro magnetic sensors and sensing application. Sensors and Actuators A. 59:1997;1-8.
4. Primdahl F. The fluxgate magnetometer. J. Phys. E: Sci. Instrum. 12:1979;241-253.
5. Schneider M., Kawahito S., Baltes H. High sensitivity CMOS microfluxgate sensor. IEDM'97. 1997;907-911.
6. Chiesi L., Flanagan J., Janossy B., Popovic R. Integrated planar fluxgate sensor with amorphous metal core. Eurosensors XI Proceedings, Warsaw, Poland. 3:1997;1607-1610.
7. Gottfried R., Budde W., Ulbricht S. A miniaturized magnetic field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry. in: Transducers'95 - Eurosensors IX. 289A(12):1995;229.
8. Kawahito S., Satoh H. Micro-fluxgate magnetic sensing elements using closely-coupled excitation and pickup coils. in: Transducers'95 - Eurosensors IX. 290A(12):1995;233.