A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 443-447

  Gottfried Gottfried, Ralf ^a   Budde, Wolfram ^a   Jähne, Rolf ^a   Kück, Heinz ^a   Sauer, Bodo ^a   Ulbricht, Steffen ^a   Wende, Ulrich ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

CMOS; Fluxgates; Magnetic field sensors; Microsystems; Signal processing; Thin film sensors

Indexed keywords

EID: 0000977627     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80001-5     Document Type: Article

References (4)

1. B. Sauer, R. Gottfried-Gottfried, Th. Haase and H. Kück, CMOS-compatible integration of thin ferromagnetic films, Sensors and Actuators A, 41-42 (1994) 582-584.
2. S. Kawahito, Y. Sasaki, M. Ishida and T. Nakamura, A fluxgate magnetic sensor with micromachined solenoids and electroplated cores, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 888-891.
3. B. Sauer, Th. Haase and R. Gottfried-Gottfried, Fluxgate Sensor in CMOS-kompatibler Planartechnologie, Sensoren: Technologie und Anwendung, Bad Nauheim, Germany, March 1994, ITG-Fachbericht 126, pp. 441-446.
4. R. Jähne, W. Budde, R. Gottfried-Gottfried, T. Hörning, B. Sauer and S. Ulbricht, Ein CMOS-ASIC für den Betrieb eines planaren Fluxgate Magnetometers, Mikroelektronik, Baden-Baden, Germany, 20-22 March, 1995, GME-Fachbericht 15, pp. 413-418.