Composition and morphological characteristics of chemically sprayed fluorine-doped zinc oxide thin films deposited on Si(1 0 0)

Physica B: Condensed Matter

Volumn 390, Issue 1-2, 2007, Pages 10-16

  Castaneda L ^a,b   Maldonado, A ^c   Cheang Wong, J C ^a   Terrones, M ^b,d   de la L Olvera, M ^c  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^b División de Ciencia   (Mexico)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

^d INSTITUTO POTOSINO DE INVESTIGACIÓN CIENTÍFICA Y TECNOLÓGICA   (Mexico)

Author keywords

Chemical spray; RBS; Semiconductor oxides; Thin films; ZnO

Indexed keywords

DEPOSITION; DOPING (ADDITIVES); FLUORINE; MORPHOLOGY; SILICON; SPRAYING; STOICHIOMETRY; ZINC OXIDE;

CHEMICAL SPRAY; SEMICONDUCTOR OXIDES; SUBSTRATE TEMPERATURE; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 33846236878     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2006.07.020     Document Type: Article

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