A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas

Physics of Plasmas

Volumn 13, Issue 12, 2006, Pages

  Zhu, Xi Ming ^a   Pu, Yu Dong ^a   Guo, Zhi Gang ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INDUCTIVELY COUPLED PLASMA; LIGHT EMISSION; MOLECULAR DYNAMICS; NITROGEN; PLASMAS; SPECTROSCOPIC ANALYSIS;

LANGMUIR PROBE MEASUREMENT; NITROGEN DISCHARGE; OPTICAL EMISSION SPECTROSCOPY;

CARRIER CONCENTRATION;

EID: 33846070088     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2397583     Document Type: Article

References (14)

1. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 11, 525 (2002).
2. V. Guerra, P. A. Sá, and J. Loureiro, Eur. Phys. J.: Appl. Phys. 28, 125 (2004).
3. J. Levaton, J. Amorim, V. Monna, J. Nagai, and A. Ricard, Eur. Phys. J.: Appl. Phys. 26, 59 (2004).
4. X. M. Zhu and Y. K. Pu, Phys. Plasmas 13, 063507 (2006).
5. A. A. Mihajlov (private communication, 2005).
6. I. V. Adamovich (private communication, 2005).
7. G. Black, H. Wise, S. Schechter, and R. L. Sharpless, J. Chem. Phys. 60, 3526 (1974).
8. A. Lofthus and P. H. Krupenie, J. Phys. Chem. Ref. Data 6, 113 (1977).
9. Z. D. Kang and Y. K. Pu, Chin. Phys. Lett. 19, 211 (2002).
10. S. Koike, T. Sakamoto, H. Kobori, H. Matsuura, and H. Akatsuka, Jpn. J. Appl. Phys., Part 1 43, 5550 (2004).
11. D. E. Shemansky, J. M. Ajello, and I. Kanik, Astrophys. J. 452, 472 (1995).
12. X. M. Zhu and Y. K. Pu, Phys. Plasmas 12, 103501 (2005).
13. B. Bakowski, G. Hancock, R. Peverall, G. A. D. Ritchie, and L. J. Thornton, J. Phys. D 37, 2064 (2004).
14. Q. Wang, I. Koleva, V. M. Donnelly, and D. J. Economou, J. Phys. D 38, 1690 (2005).