A molecular kinetic model for the optical emission spectroscopy technique in inductively coupled nitrogen plasma

Physics of Plasmas

Volumn 13, Issue 6, 2006, Pages

  Zhu, Xi Ming ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; EMISSION SPECTROSCOPY; KINETIC THEORY; MOLECULAR DYNAMICS; NITROGEN; SPECTROMETERS;

KINETIC MODEL; LANGMUIR PROBE; NITROGEN PLASMA; OPTICAL EMISSION SPECTROSCOPY;

PLASMAS;

EID: 33745728502     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2207124     Document Type: Article

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