Batch fabrication of micro-coils for MR spectroscopy on silicon

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 227-230

  Syms, R R A ^a   Ahmad, M M ^a   Young, I R ^a   Gilderdale, D ^a   Collins, D J ^b   Leach, M O ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b INSTITUTE OF CANCER RESEARCH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BIOPSY; ELECTRIC CONDUCTORS; ELECTROPLATED PRODUCTS; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTORESISTORS; REACTIVE ION ETCHING; SILICON;

BASEPLATES; DEEP REACTIVE ION ETCHING (DRIE); MICROCOILS; PHOTORESIST MOULDS;

MICROSENSORS;

EID: 33846062332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597677     Document Type: Conference Paper

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