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Volumn 87, Issue 5, 2005, Pages
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Optical vibration sensor fabricated by femtosecond laser micromachining
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Author keywords
[No Author keywords available]
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Indexed keywords
DISPLACEMENT;
FEMTOSECOND LASER OSCILLATOR;
FREQUENCY RANGE;
MECHANICAL VIBRATION;
OPTICAL VIBRATION SENSOR;
LASER BEAMS;
LASERS;
LIGHT TRANSMISSION;
MECHANICAL PROPERTIES;
MICROMACHINING;
OSCILLISTORS;
WAVEGUIDES;
OPTICAL SENSORS;
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EID: 33645513990
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2008362 Document Type: Article |
Times cited : (55)
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References (18)
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