Electrical probe calibration and power calculation for a miniature 13.56 MHz plasma source

Measurement Science and Technology

Volumn 17, Issue 11, 2006, Pages 3027-3032

  Leveille V ^a   Coulombe, S ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Atmospheric pressure glow discharge; Current; Power; RF plasma; Voltage

Indexed keywords

CALIBRATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; PLASMA DEVICES;

ATMOSPHERIC PRESSURE GLOW DISCHARGE; RESISTIVE LOADS;

ELECTRIC VARIABLES MEASUREMENT;

CALIBRATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC VARIABLES MEASUREMENT; PLASMA DEVICES;

EID: 33846039862     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/11/023     Document Type: Article

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