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Volumn 38, Issue 12-13, 2006, Pages 1654-1657
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An application of cesium-xenon co-sputtering: Quantitative study of a Pd-Rh thin film by ToF-SIMS
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Author keywords
Cesium; Ionization; MCs; Pd; Quantification; Rh; ToF SIMS
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Indexed keywords
CESIUM COMPOUNDS;
ELECTRON TUNNELING;
IONIZATION;
MATHEMATICAL MODELS;
PALLADIUM;
RHODIUM;
SECONDARY ION MASS SPECTROMETRY;
SPUTTER DEPOSITION;
XENON;
CESIUM BEAM CONCENTRATION;
CO-SPUTTERING;
MOLECULAR IONS;
TUNNELING MODELS;
THIN FILMS;
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EID: 33845955308
PISSN: 01422421
EISSN: 10969918
Source Type: Journal
DOI: 10.1002/sia.2416 Document Type: Conference Paper |
Times cited : (2)
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References (14)
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