A method of accurately determining the positions of the edges of depletion regions in semiconductor junctions

Journal of Applied Physics

Volumn 100, Issue 11, 2006, Pages

  Ong, Vincent K S ^a   Kurniawan, Oka ^a   Moldovan, Grigore ^b   Humphreys, Colin J ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; GALLIUM NITRIDE; LIGHT EMITTING DIODES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES;

BEAM-SAMPLE INTERACTION; ELECTRON BEAM INDUCED CURRENT (EBIC); LOGARITHMIC EBIC PROFILE;

SEMICONDUCTOR JUNCTIONS;

EID: 33845900687     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2369652     Document Type: Article

References (18)

1. H. J. Leamy, J. Appl. Phys. 53, R51 (1982).
2. J. W. Orton and P. Blood, The electrical characterization of semiconductors: measurement of minority carrier properties (Academic, London, 1990).
3. A. Poyai, C. Claeys, and E. Simoen, Appl. Phys. Lett. 80, 1192 (2002).
4. O. D. N. Barreau, S. Sadewasser, Th. Glatzel, H. Steigert, K. Maknys, S. Anand, and M. Ch. Lux-Steiner, Scanning Tunneling Microscopy/Spectroscopy and Related Techniques: 12th International Conference, 2003, Vol. 696, pp. 669-676.
5. R. M. Hal Edwards, R. San Martin, E. U, M. Gribelyuk, R. Mahaffy, C. K. Shih, R. S. List, and V. A. Ukraintsev, Appl. Phys. Lett. 72, 698 (1998).
6. R. M. Feenstra, E. T. Yu, J. M. Woodall, P. D. Kirchner, C. L. Lin, and G. D. Pettit, Appl. Phys. Lett. 61, 795 (1992).
7. R. Stengl, IEEE Trans. Electron Devices ED-34, 911 (1987).
8. E. Yakimov, Scanning Microsc. 6, 81 (1992).
9. P. Chiu and I. Shih, Proc. SPIE 4833, 237 (2002).
10. S. C. Jain, M. Willander, J. Narayan, and R. Van Overstraeten, J. Appl. Phys. 87, 965 (2000).
11. L. Chernyak, A. Osinsky, and A. Schulte, Solid-State Electron. 45, 1687 (2001).
12. D. B. Holt and D. C. Joy, SEM Microcharacterization of Semiconductors, (Academic, New York, 1989).
13. F. Berz and H. K. Kuiken, Solid-State Electron. 19, 437 (1976).
14. C. Donolato, Solid-State Electron. 25, 1077 (1982).
15. V. K. S. Ong, Rev. Sci. Instrum. 69, 1814 (1998).
16. G. A. Hungerford, Ph.D. thesis, University of London, 1987.
17. T. E. Everhart and P. H. Hoff, J. Appl. Phys. 42, 5837 (1971).
18. G. Moldovan, P. Kazemian, P. Edwards, V. K. S. Ong, O. Kurniawan, and C. J. Humphreys, Ultramicroscopy (in press).