MEMS reliability: Accurate measurements of beam stiffness using nanoindentation techniques

Proceedings of MNT for Aerospace Applications, CANEUS2006

Volumn 2006, Issue , 2006, Pages

  Seguineau, Cédric ^a   Desmarres, Jean Michel ^a   Dhennin, Jérémie ^a   Lafontan, Xavier ^b   Ignat, Michel ^c  

^a CNES   (France)

^b Nova MEMS   (France)

^c UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; BENDING STRENGTH; GOLD; INDENTATION; MEASUREMENT THEORY; NANOTECHNOLOGY; STIFFNESS;

BEAM STIFFNESS; GOLD BRIDGES; NANOINDENTATION TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 33845797638     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. S. Rigo, "Microcaractérisation des mateŕiaux et structures issus des technologies microsystèmes", pH Thesis Science des Matériaux, 2003
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