Measurement of the residual stresses of the handing structures used in MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 704-713

  Rigo, Sébastien ^a,b   Desmarres, Jean Michel ^b   Masri, Talal ^c   Petit, Jacques Alain ^c  

^a MEMSCAP   (France)

^b CNES   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Cantilever; Capacitance; MEMS reliability; MUMPs; Residual stress

Indexed keywords

ACCELEROMETERS; CAPACITANCE; FAILURE (MECHANICAL); FATIGUE OF MATERIALS; FRACTURE; RESIDUAL STRESSES;

MECHANICAL ELEMENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 6444244829     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462875     Document Type: Article

References (9)