Resistance and sheet resistance measurements using electron beam induced current

Applied Physics Letters

Volumn 89, Issue 24, 2006, Pages

  Czerwinski, A ^a   Pluska M ^a   Ratajczak, J ^a   Szerling, A ^a   Katcki J ^a  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; HETEROJUNCTIONS; INDUCED CURRENTS; MOLECULAR BEAM EPITAXY; NETWORKS (CIRCUITS); SEMICONDUCTOR LASERS;

ELECTRON BEAM INDUCED CURRENT (EBIC); HIGH ELECTRON BEAM CURRENTS; LATERAL CONFINEMENTS; SHEET RESISTANCE;

ELECTRIC RESISTANCE;

EID: 33845777564     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2405886     Document Type: Article

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