Kinetic modeling of the NF3 decomposition via dielectric barrier discharges in N2/NF3 mixtures

Plasma Processes and Polymers

Volumn 3, Issue 9, 2006, Pages 682-691

  Chen, Hsin Liang ^a   Lee, How Ming ^b   Chang, Moo Been ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b Institute of Nuclear Research   (Taiwan)

Author keywords

Air pollution control technologies; Greenhouse gases (GHGs); N2(A3 u+); Nitrogen trifluoride (NF3); Non thermal plasmas (NTP); Perfluorocompound (PFC)

Indexed keywords

AIR POLLUTION CONTROL; COMPUTER SIMULATION; DECOMPOSITION; ELECTRONS; GLOBAL WARMING; GREENHOUSE EFFECT; MATHEMATICAL MODELS; NITROGEN COMPOUNDS; PARTICULATE EMISSIONS; PLASMAS; REACTION KINETICS;

DIELECTRIC BARRIER DISCHARGE REACTOR; NITROGEN TRIFLUORIDE; NON-THERMAL PLASMA; PERFLUOROCOMPOUND;

CHEMICAL REACTORS;

EID: 33845749739     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200600037     Document Type: Conference Paper

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