Ferro-electric pellet shape effect on C2F6 removal by a packed-bed-type nonthermal plasma reactor

IEEE Transactions on Plasma Science

Volumn 32, Issue 6, 2004, Pages 2175-2183

  Takaki, Koichi ^a,b   Urashima, Kuniko ^a,c   Chang, Jen Shih ^a  

^a MCMASTER UNIVERSITY   (Canada)

^b IWATE UNIVERSITY   (Japan)

^c NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY POLICY   (Japan)

Author keywords

C2F6; Dielectric barrier discharge; Ferro electric; Nonthermal plasma; Packed bed; Partial discharge; PFCs; Semiconductor process flue gas

Indexed keywords

ABSORPTION SPECTROSCOPY; CARRIER CONCENTRATION; CHEMICAL REACTIONS; ELECTRODES; FERROELECTRIC CERAMICS; FLUE GASES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITROGEN; PACKED BEDS; PARTIAL DISCHARGES; PERMITTIVITY;

DIELECTRIC BARRIER DISCHARGE; FERROELECTRIC PELLET; NONTHERMAL PLASMA; PERFLUOROETHANE; PFCS; PLASMA REACTOR; SEMICONDUCTOR PROCESS FLUE GAS;

PLASMA DEVICES;

EID: 11244251951     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2004.837614     Document Type: Article

References (34)

1. M. Hood and E. Sweet, "Air pollution in China," IEEE Spectrum, vol. 37, pp. 34-38, Nov., 1999.
2. R. Hackam and H. Akiyama, "Air pollution control by electrial discharges," IEEE Trans. Diel. Elect. Insul., vol. 7, pp. 654-683, Oct., 2000.
3. K. Urashima and J. S. Chang, "Removal of volatile organic compounds from air streams and industrial flue gases by nonthermal plasma technology," IEEE Trans. Diel. Elect. Insul., vol. 7, pp. 602-614. Oct., 2000.
4. 6 removal," Environ. Sci. Eng., vol. 35, no. 8, pp. 1587-1592, 2001.
5. J. S. Chang, "Recent development of plasma pollution control technology: A critical review," Sci. Technol. Adv. Mater., vol. 2, pp. 571-576, 2001.
6. H. Hodges, Environmental Pollution. New York: Holt, 1973.
7. A. Mizuno and H. Ito, "Basic performance of an electrostatically augmented filter consisting of a packed ferroelectric pellet layer," J. Electrostatics, vol. 25, pp. 97-107, 1990.
8. 2 reduction from combustion flue gases by AC ferroelectric packed bed reactor," IEEE Trans. Ind. Applicat., vol. 29, pp. 876-881, Sept.-Oct., 1993.
9. T. Yamamoto, J. S. Chang, A. A. Berezin, H. Kohno, S. Honda, and A. Shibuya, "Decomposition of toluene O-xylene, trichloroethylene and their mixture using BaTiO3 packed bed plasma reactor," J. Adv. Oxidation Tech., vol. 1, pp. 67-68, 1996.
10. S. Furamura, A. H. Zhang, and T. Yamamoto, "The dependence of nonthermal plasma behavior of VOC's on their chemical structures," J. Electrostatics, vol. 42, pp. 51-62, 1997.
11. Y. H. Song, S. Y. Han, M. S. Cha, K. T. Kim, K. Choi, and S. J. Kim, "Synergetic effect of nonthermal plasma and catalysts on VOC's decomposision," J. Adv. Oxidation Tech., vol. 6, pp. 11-16, 2003.
12. A. Ogata, K. Mizuno, S. Kushiyama, and T. Yamamoto, "Methane decomposition in a barium titanate packed-bed nonthermal plasma reactor," Plasma Chem. Plasma Process., vol. 18, pp. 363-373, 1998.
13. T. Oda, T. Takahashi, and R. Yamashita, "Non-thermal plasma processing for VOC's decomposition and NOx removal in flue gas," J. Adv. Oxidation Technol., vol. 2, no. 2, pp. 337-345, 1997.
14. 6 from a semiconductor process flue gas by a ferroelectric packed-bed barrier discharge reactor with an adsorber," IEEE Trans. Ind. Applicat., vol. 37, pp. 1456-1463, Sept.-Oct., 2001.
15. 3 from a semiconductor-process flue gas by tandem packed-bed plasma reactor and ad- sorbent hybrid system," IEEE Trans. Ind. Appl., vol. 36, pp. 1251-1259, Sept.-Oct. 2000.
16. T. Yamamoto, J. S. Chang, K. Kostov, Y. Okayasu, T. Kato, T. Iwaizumi, and K. Yoshimura, "NFa treatment by ferroelectric packed-bed plasma reactor," J. Adv. Oxidation Technol., vol. 4, pp. 454-457, 1999.
17. T. Kawasaki, H. Hirakawa, S. Kanazawa, T. Ohkubo, and Y. Nomoto, " NOx removal using a packed-bed plasma reactor with catalytic pellets," in Proc. 3rd Int. Symp. Non-Thermal Plasma Tech. Pollut. Control, Seogwipo, Korea, 2001, pp. 203-207.
18. S. Futamura, A. Zhang, and T. Yamamoto, "Mechanisms for formation of inorganic byproducts in plasma chemical processing of hazardous air pollutants," IEEE Trans. Ind. Applicat., vol. 35, pp. 760-766, July-Aug., 1999.
19. A. Zhang, S. Futamura, and T. Yamamoto, "Nonthermal plasma chemical processing of bromomethane," J. Air Waste Manage. Assoc., vol. 49, pp. 1442-1448, 1999.
20. H. M. Lee and M. B. Chang, "Gas-phase removal of acetaldehyde via packed-bed dielectric barrier discharge reactor," Plasma Chem. Plasma Process., vol. 21, pp. 329-343, 2001.
21. J. S. Chang, P. A. Lawless, and T. Yamamoto, "Corona discharge processes," IEEE Trans. Plasma Sci., vol. 19, pp. 1152-1166, Dec. 1991.
22. B. Eliasson and U. Kogelschatz, "Nonequilibrium volume plasma chemical processing," IEEE Trans. Plasma Sci., vol. 19, pp. 1063-1077, Dec., 1991.
23. K. Uchimura and J. S. Chang, "Effect of dielectric constant on the ferroelectric packed-bed barrier discharge characteristics" (in Japanese), Trans. Inst. Elect. Eng. Japan, vol. 118A, pp. 426-427, 1998.
24. J. S. Chang, "Electromagnetic emission from atmospheric pressure gas discharge," IEICE Trans. Commun., vol. E79-B, pp. 447-456, 1996.
25. J. S. Chang, A. Chakrabarti, K. Urashima, and M. Arai, "The effect of barium titanium pellet shapes on the gas discharge characteristics of ferroelectric packed bed reactors," in Annu. Rep. 1998 Conf. Elect. Insula- tion Dielect. Phenomena, 1998, pp. 485-488.
26. K. Takaki, J. S. Chang, and K. G. Kostov, "Atmospheric pressure nitrogen plasmas in a ferro-electric packed bed barrier discharge reactor part I: Modeling," IEEE Trans. Dielect. Elect. Insulation pp. 481-490, June 2004.
27. L. G. H. Huxley and R. W. Crompton, The Diffusion and Drift of Electrons in Gases. New York: Wiley, 1974.
28. H. Hasegawa, H. Date, M. Shimozuma, K. Yoshida, and H. Tagashira, " The drift velosity and longitudinal diffusion coefficient of electrons in nitrogen and carbon dioxide from 20 to 1000 Td," J. Phys. D: Appl. Phys., vol. 29, pp. 2664-2667, 1996.
29. A. B. Wedding, H. A. Blevin, and J. Fletcher, "The transport of electrons through nitrogen gas," J. Phys. D: Appl. Phys., vol. 18, pp. 2361-2373, 1985.
30. Y. Nakamura, "Drift velocity and longitudinal diffusion coefficient of electrons in nitrogen and carbon monoxide," J. Phys. D: Appl. Phys. vol. 20, pp. 933-938, 1987.
31. W. Roznerski and K. Leja, "Electron drift velocity in hydrogon, nitrogen, oxygen, carbon monoxide, carbon dioxide and air at moderate E/ N," J. Phys. D: Appl. Phys., vol. 17, pp. 279-285, 1984.
32. W. Roznerski, "Transport parameters of electron swarms in nitrogen at moderate and elevated E/N," J. Phys. D: Appl. Phys., vol. 29, pp. 614-617, 1996.
33. +) in the gas phase," J. Phys. Chem. Data, vol. 28, pp. 1453-1483, 1999.
34. F. W. Breitbarth, D. Berg, K. Dumke, and H.-J. Tiller, " Investigation of the low-pressure plasma-chemical conversion of fluorocarbone waste gases," Plasma Chem. Plasma Process., vol. 17, pp. 39-57, 1997.