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International Journal of Advanced Manufacturing Technology
Volumn 31, Issue 7-8, 2007, Pages 705-715
Development of a new cluster index for wafer defects
Author keywords

Defect clustering; Integrated circuit; Multivariate analysis; Rotation of axes; Wafer
Indexed keywords

COMPUTATION THEORY; INTEGRATED CIRCUIT MANUFACTURE; MULTIVARIABLE SYSTEMS; SILICON WAFERS; STATISTICAL METHODS;
EID: 33845736847     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-0240-5     Document Type: Article
Times cited : (16)
References (7)
  • 1
    • 0025433611 scopus 로고
    • The use and evaluation of yield models in integrated circuit manufacturing
    • Cunningham JA (1990) The use and evaluation of yield models in integrated circuit manufacturing, IEEE T Semiconduct M 3 (2):60-71
    • (1990) IEEE T Semiconduct M , vol.3 , Issue.2 , pp. 60-71
    • Cunningham, J.A.1
  • 2
    • 0031199871 scopus 로고    scopus 로고
    • Model-free estimation of defect clustering in integrated circuit fabrication
    • Friedman DJ, Hansen MH, Nair VN, James DA (1997) Model-free estimation of defect clustering in integrated circuit fabrication. IEEE T Semiconduct M 10(3):344-359
    • (1997) IEEE T Semiconduct M , vol.10 , Issue.3 , pp. 344-359
    • Friedman, D.J.1    Hansen, M.H.2    Nair, V.N.3    James, D.A.4
  • 3
    • 0032668231 scopus 로고    scopus 로고
    • A simulation-based semiconductor chip yield model incorporating a new defect cluster index
    • Jun CH, Hong Y, Kim SY, Park KS, Park H (1999) A simulation-based semiconductor chip yield model incorporating a new defect cluster index. Microelectron Reliab 39:451-456
    • (1999) Microelectron Reliab , vol.39 , pp. 451-456
    • Jun, C.H.1    Hong, Y.2    Kim, S.Y.3    Park, K.S.4    Park, H.5
  • 5
    • 0031126244 scopus 로고    scopus 로고
    • Poisson mixture yield models for integrated circuits: A critical review
    • Raghavachari M, Srinivasan A, Sullo P (1997) Poisson mixture yield models for integrated circuits: a critical review. Microelectron Reliab 37(4):565-580
    • (1997) Microelectron Reliab , vol.37 , Issue.4 , pp. 565-580
    • Raghavachari, M.1    Srinivasan, A.2    Sullo, P.3
  • 6
    • 0010968585 scopus 로고
    • Defect density distribution for LSI yield calculations
    • Stapper CH (1973) Defect density distribution for LSI yield calculations. IEEE Traps Electron Dev ED-20:655-657
    • (1973) IEEE Traps Electron Dev , vol.ED-20 , pp. 655-657
    • Stapper, C.H.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.