Multivariate simulation assessment for virtual metrology

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2006, Issue , 2006, Pages 1048-1053

  Chen, Yeh Tung ^a   Yang, Haw Ching ^b   Cheng, Fan Tien ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Monte carlo simulation; Sensitivity analysis; Virtual metrology

Indexed keywords

COMPUTER SIMULATION; MONTE CARLO METHODS; NEURAL NETWORKS; PROBABILITY DISTRIBUTIONS; SENSITIVITY ANALYSIS; VIRTUAL REALITY;

MODEL ACCURACY; SYSTEM ARCHITECTURE; VIRTUAL METROLOGY;

MULTIVARIABLE SYSTEMS;

EID: 33845672258     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2006.1641848     Document Type: Conference Paper

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