Bayesian analysis of ellipsometry measurements

AIP Conference Proceedings

Volumn 872, Issue , 2006, Pages 272-279

  Toussaint, Udo V ^a   Schwarz Selinger, Thomas ^a   Hopf, Christian ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Bayesian inference; Ellipsometry; Parameter estimation; Surface analysis

Indexed keywords

EID: 33845665887     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2423284     Document Type: Conference Paper

References (7)

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6. T. Schwarz-Selinger and A. von Keudell and W. Jacob, Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties, J. Appl. Phys. 86, 3988 (1999).
7. U. von Toussaint and V. Dose, Bayesian Analysis of Surface Diagnostics, Applied Physics A 82, 403-413 (2006).