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Volumn 25, Issue 12, 2006, Pages 2747-2755

Wafer topography-aware optical proximity correction

Author keywords

Chemical mechanical polishing (CMP); Defocus; Dummy fill; Optical proximity correction (OPC); Topography

Indexed keywords

DUMMY FILLS; GUARDBANDING; OPTICAL PROXIMITY CORRECTION (OPC); WAFER TOPOGRAPHY;

EID: 33845627400     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2006.882604     Document Type: Article
Times cited : (27)

References (19)
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  • 2
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    • L. He, A. B. Kahng, K. H. Tam, and J. Xiong, "Variability-driven considerations in the design of integrated-circuit global interconnects," in Proc. 21th Int. VMIC, Sep. 2004, pp. 214-221.
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    • He, L.1    Kahng, A.B.2    Tam, K.H.3    Xiong, J.4
  • 5
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    • Understanding the forbidden pitch phenomenon and assist feature placement
    • X. Shi, S. Hsu, F. Chen, M. Hsu, R. Socha, and M. Dusa, "Understanding the forbidden pitch phenomenon and assist feature placement," Proc. SPIE, vol. 4689, pp. 985-996, 2002.
    • (2002) Proc. SPIE , vol.4689 , pp. 985-996
    • Shi, X.1    Hsu, S.2    Chen, F.3    Hsu, M.4    Socha, R.5    Dusa, M.6
  • 7
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    • P. Gupta, A. B. Kahng, D. Sylvester, and J. Yang, "A cost-driven lithographic correction methodology based on off-the-shelf sizing tools," in Proc. ACM/IEEE Des. Autom. Conf., Jun. 2003, pp. 16-21.
    • (2003) Proc. ACM/IEEE Des. Autom. Conf. , pp. 16-21
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  • 11
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    • Wafer topography-aware optical proximity correction for better DOF margin and CD control
    • P. Gupta, A. B. Kahng, C.-H. Park, K. Samadi, and X. Xu, "Wafer topography-aware optical proximity correction for better DOF margin and CD control," in Proc. SPIE-Int. Soc. Opt. Eng., 2005, vol. 5853, p. 844.
    • (2005) Proc. SPIE-int. Soc. Opt. Eng. , vol.5853 , pp. 844
    • Gupta, P.1    Kahng, A.B.2    Park, C.-H.3    Samadi, K.4    Xu, X.5
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  • 16
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    • Fast proximity correction with zone sampling
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    • (1994) Proc. SPIE-int. Soc. Opt. Eng. , vol.2197 , pp. 294-301
    • Stirniman, J.1    Rieger, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.