Effect of the underlayer on the microstructure and surface evolution in Al-0.5wt.%Cu polycrystalline thin films

Journal of Electronic Materials

Volumn 31, Issue 1, 2002, Pages 55-65

  Lita, Adriana E ^a   Sanchez Jr , John E ^b  

^a AGERE SYSTEMS   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

Al 0.5wt. Cu; Texture; Thin films

Indexed keywords

COPPER COMPOUNDS; CRYSTAL ORIENTATION; FILM GROWTH; GRAIN SIZE AND SHAPE; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION;

AL-0.5WT.; FILM CONTINUITY; OFFSET ISLANDS;

THIN FILMS;

EID: 33845617603     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0173-9     Document Type: Article

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