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Volumn 91, Issue 5, 2002, Pages 3459-3467

Hydrogenated amorphous and microcrystalline GaAs films prepared by radio-frequency magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords


EID: 33845467098     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1446241     Document Type: Article
Times cited : (6)

References (48)
  • 18
    • 33845406403 scopus 로고
    • U.S. Patent No. 3,616,450
    • P. J. Clarke, U.S. Patent No. 3,616,450, 1971.
    • (1971)
    • Clarke, P.J.1
  • 19
    • 33845402442 scopus 로고
    • edited by J. L. Vossen and W. Kern (Academic, New York)
    • D. B. Fraser, in Thin Film Processes, edited by J. L. Vossen and W. Kern (Academic, New York, 1978), p. 115.
    • (1978) Thin Film Processes , pp. 115
    • Fraser, D.B.1
  • 20
    • 33845395357 scopus 로고    scopus 로고
    • edited by M. R. Brozel and G. E. Stillman (IEE, New York)
    • R. Murri and N. Pinto, in Properties of Gallium Arsenide, edited by M. R. Brozel and G. E. Stillman (IEE, New York, 1996), p. 155.
    • (1996) Properties of Gallium Arsenide , pp. 155
    • Murri, R.1    Pinto, N.2
  • 36
    • 0039621727 scopus 로고
    • edited by L. I. Maissel and R. Glang (McGraw-Hill, New York)
    • R. Glang, in Handbook of Thin Film Technology, edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970), pp. 1-41.
    • (1970) Handbook of Thin Film Technology , pp. 1-41
    • Glang, R.1
  • 37
  • 38
    • 33845413429 scopus 로고    scopus 로고
    • See, for example, Bandet et al., Ref. 16
    • See, for example, Bandet et al., Ref. 16.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.