Electrical properties of pn junctions formed by plasma enhanced epitaxial growth

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 2984-2988

  Reidy, Sean G ^a   Varhue, Walter J ^a   Adams, Ed ^b   Lavoie, Mark ^b  

^a UNIVERSITY OF VERMONT   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845449550     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1436559     Document Type: Article

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