Investigation of capillary adhesion between the microcantilever and the substrate with electronic speckle pattern interferometry

Applied Physics Letters

Volumn 89, Issue 23, 2006, Pages

  Li, Xide ^a   Peng, Yun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COMPUTATION THEORY; INTERFEROMETRY; VOLUME FRACTION;

CAPILLARY ADHESION; ELECTRONIC SPECKLE PATTERN INTERFEROMETRY; MICROCANTILEVERS; TRANSIENT DEFORMATION;

ADHESION;

EID: 33845390863     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2403187     Document Type: Article

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