Concise formula for the Zernike coefficients of scaled pupils

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 3, 2006, Pages

  Janssen, Augustus J E M ^a   Dirksen, Peter ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Na scaling; Optical lithography; Strehl ratio; Zernike coefficients

Indexed keywords

IMAGE ANALYSIS; IMAGING SYSTEMS; LITHOGRAPHY; OPTIMIZATION; PROJECTION SYSTEMS;

PUPILS; STREHL RATIO; VARIABLE FRACTION; ZERNIKE COEFFICIENTS;

PLASTIC LENSES;

EID: 33845385806     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2345672     Document Type: Article

References (7)

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